Unlike smaller, open-air wash and cure stations, the Astron 2L comes partially disassembled to protect the motor and LED array during shipping.
: Operates on 187–228 VAC (208V nominal), three-phase, 50/60 Hz power. Cooling System : Requires water cooling with a minimum flow rate of
may be used for ignition, the system can operate on process gases alone once running, which simplifies gas delivery systems. Broad Pressure Range
Minor areas for improvement
The manual for this device is critical because the Astron 2L operates with high voltages (up to 180V for the ion collector and 500V for the filament bias). Mishandling can lead to electric shock or destruction of the fragile gauge filament.
The (specifically the AX7657 ) is a remote plasma source used primarily in semiconductor manufacturing for chamber cleaning and reactive gas generation. Because these are specialized industrial components, a formal "user manual" is often protected by MKS proprietary rights, but you can find technical specifications and operational overviews through industrial resellers and technical support platforms. Quick Technical Summary
Connect NF₃ and Argon lines. Ensure appropriate gas filters are in place. mks astron 2l manual
Check for NF₃ flow fluctuations or contamination in the chamber.
applications, Chemraz® or similar high-performance elastomers are typically used.
If you have specific interests or areas of application in mind, I'd be happy to try and help you find more targeted resources! Unlike smaller, open-air wash and cure stations, the
and other fluorine-based chemistries, resulting in faster chamber cleaning times and lower gas consumption. Continuous Operation
Mismatch in gas chemistry or pressure levels disrupting the plasma impedance.
The ASTRON 2L should be mounted close to the processing chamber (within a few feet) to minimize the recombination of fluorine radicals before they enter the chamber. Broad Pressure Range Minor areas for improvement The
: When atomic fluorine meets moisture or standard process elements, it generates toxic gases like Hydrogen Fluoride (HF) , Silicon Tetrafluoride ( SiF4cap S i cap F sub 4 ), or Tungsten Hexafluoride ( WF6cap W cap F sub 6
Over-range (top LED flashing) indicates pressure > 10⁻² Torr. The manual advises checking if the system is under rough vacuum or if the gauge is contaminated.